DD ENV 1071-4:1996 - Advanced technical ceramics. Methods of test for ceramic coatings - Determination of chemical composition
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This Part of ENV 1071 describes a method for chemical analysis of ceramic coatings by
means of electron probe microanalysis (EPMA) using a scanning electron microscope
(SEM) or an electron-probe microanalyser.
The methods described are limited to the examination of single layer coatings when the
analysis is carried out normal to the sample surface, but graded and multilayer coatings
may also be analysed in cross-section if the thickness of the individual layers or gradations
are greater than the maximum width of the volume of material within which characteristic
or fluorescent X-rays are generated.