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60μm memsoi low g memes accelerometer design

60μm memsoi low g memes accelerometer design / Nik Mohd Amali Fikri Iberahim
MEMS (Microelectromechanical Systems) merujuk kepada teknologi yang menggabungkan komponen elektrikal dan mekanikal yang bersaiz dari 1~1000 micron. MEMS jejari akselerometer telah pun berjaya diintegrasi dan digunakan sebagai sensor untuk “air-bag” di dalam setiap kenderaan. Di dalam tesis ini, rekabentuk optimum akselerometer bagi Poly-Si telah dibincangkan. Rekabentuk akselerometer ini menggunakan “folded-beam” untuk meningkatkan lagi sensitiviti. Pemberat yang boleh bergerak disambung pada “folded-beam” melalui “anchors”. Terdapat jejari sikat yang boleh bergerak pada tepi pemberat. Setiap jejari sikat dikepit dengan dua jejari sikat yang tidak boleh bergerak. Ruang diantara jejari sikat bergerak dan tidak bergerak telah menyebabkan berlaku perbezaan voltan dan fenomena in dipanggil “capacitance”. Jika terdapat daya seperti kelajuan dikenakan pada struktur, satu daya inertia akan terhasil dan daya inertia ini akan menggerakkan pemberat dan melentikkan “folded-beam”. Oleh sebab itu juga, ruang antara jejari sikat akan berubah dan menghasilkan voltan. Dengan mengukur nilai “capacitance” antara jejari sikat ini daya kelajuan dapat diketahui. Analis CONVENTORWARE FEM digunakan untuk mengetahui sensitiviti dan frekuensi resonan pada struktur. Dengan mengubah setiap pemboleh ubah, hubungan antara setiap parameter dan sensitiviti diketahui. Bentuk graf untuk setiap parameter panjang, lebar dan pemberat dengan sensitiviti telah diketahui dan diguna pakai untuk meramal tingkah laku setiap parameter. Dengan mengubah parameter tertentu nilai sensitiviti boleh dikehendaki. _______________________________________________________________________________________________________ MEMS (Microelectromechanical Systems) refers to the technology integrating electrical and mechanical components with feature size 1~1000 microns. MEMS accelerometers have been successfully applied for air-bag deployment systems in automobiles. In this thesis, the design optimization of a poly-silicon surface-micromachined MEMS comb accelerometer is discussed. The device uses folded-beams. There are movable fingers from both sides of movable mass. Each movable finger has left and right fixed comb fingers surrounding it, so that a differential pairs is formed. Any acceleration along the sensitive direction will induce inertial force on movable mass and deflect the beams. Hence the differential capacitance gap will change. By measuring this differential capacitance change, the experienced acceleration can be measured. CONVENTORWARE FEM analysis simulation is used to extract the device sensitivity and resonant frequency of the device. By gradually varying the design parameters in CONVENTORWARE simulation, the relationship between the device sensitivity and various design parameters is derived. The curve of device sensitivity versus beam width, beam length and mass width are derived and they are good agreement with theoretical prediction. From analysis it is concluded that the device behavior strongly depends upon various design parameters. By adjusting design parameters, desired sensitivity can be obtained. Based on simulation results, a set of optimized design parameters for the comb accelerometer is decided.
Contributor(s):
Nik Mohd Amali Fikri Iberahim - Author
Primary Item Type:
Final Year Project
Identifiers:
Barcode : 00003096389
Accession Number : 875004769
Language:
English
Subject Keywords:
Microelectromechanical Systems; poly-silicon; accelerometer
First presented to the public:
6/1/2012
Original Publication Date:
3/8/2018
Previously Published By:
Universiti Sains Malaysia
Place Of Publication:
School of Electrical & Electronic Engineering
Citation:
Extents:
Number of Pages - 57
License Grantor / Date Granted:
  / ( View License )
Date Deposited
2018-03-08 12:03:04.685
Date Last Updated
2019-01-07 11:24:32.9118
Submitter:
Mohd Jasnizam Mohd Salleh

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60μm memsoi low g memes accelerometer design1 2018-03-08 12:03:04.685