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Modelling and simulation of microaccelerometer using mems software / Mohd Razemy Mohd Raffay

Modelling and simulation of microaccelerometer using mems software_ Mohd Razemy Mohd Raffay_E3_2009_875000082_00003079825_NI

Abstract Projek ini bertujuan untuk merekabentuk dan simulasi accelerometer dengan menggunakan perisian MEMS. Accelerometer ialah sejenis sensor inersia yang digunakan untuk mengukur pecutan atau nyahpecutan bagi objek yang sedang bergerak. Dalam projek tersebut, CoventorWare digunakan untuk merekabentuk “comb drive accelerometer” yang bersifat kapasitif. Pada permulaan, satu model skematik telah dibina. Semua dimensi bagi accelerometer dinyatakan sebagai pembolehubah global dalam simbol COVENTOR. Sifat accelerometer dapat dikaji apabila skematik diuji dalam pelbagai keadaan dengan menggunakan analisis-analisis prestasi. Alat plot digunakan untuk melihat dan mengukur keputusan secara grafik. Selepas itu, “Layout Editor” digunakan untuk menjana “2-D layout” daripada skematik. Model 3-D dibina dalam proses seterusnya untuk memastikan accelerometer yang direkabentuk adalah betul. Hasil analisis dibandingkan dengan matematikal analisis untuk memastikan analisis yang diperolehi adalah betul. Accelerometer berfungsi pada prestasi terbaik pada pecutan 5g.Oleh itu, sistem tersebut boleh diapplikasikan di dalam cakera keras untuk menghentikan operasi cakera keras secara automatik apabila cakera keras terjatuh secara tiba-tiba. Ini dapat mengelakkan dari kehilangan data dalam cakera keras. _________________________________________________________________________________________ The objective of this project is to design and simulate an accelerometer by using MEMS software. Accelerometer is an inertial sensor that measures the acceleration or deceleration of a moving object. In this project, a capacitive comb drive accelerometer is designed by using CoventorWare. CoventorWare supports both system-level and physical design approaches. A schematic model of the accelerometer is developed. The dimensions of the accelerometer are defined as global variables. The schematic are simulated under various conditions by using Architect’s performance analyses. Plotting tools are used to view and measure results in several graphical formats. After refining and finalizing a design, the design is then transferred to 2-D layout using Layout Editor. For verification, a 3-D model was built. In this report, the results obtained from the analysis are compared with the formula to ensure the analysis obtained is correct. The accelerometer is at its best performance when it operates at 5g acceleration. Thus, the accelerometer can be used in hard disk to detect sudden fall. The hard disk will be turned off automatically when the accelerometer detect sudden fall. Hence, the data in the hard disk can be saved from loss when the hard disk falls down.

Contributor(s): Mohd Razemy Mohd Raffay - Author Primary Item Type: Final Year Project Identifiers: Accession Number : 875000082_ Language: English Subject Keywords: accelerometer; inertial sensor; First presented to the public: 4/1/2010 Original Publication Date: 10/29/2018 Previously Published By: Universiti Sains Malaysia Place Of Publication: School of Electrical & Electronic Engineering Citation: Extents: Number of Pages - 79 License Grantor / Date Granted:   / ( View License ) Date Deposited 2018-10-29 16:18:39.418 Date Last Updated 2019-01-07 11:24:32.9118 Submitter: Nor Hayati Ismail

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