DD ENV 50218:1996 - Description of a parametrized European mini test chip
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This publication documents the parameterized MOS test structures of the device model Parameter
extraction Test Chip (PTC) of the European Mini Test Chip (ETC). The devices of the PTC are
a subset of the devices of the ETC. The modules of the ETC provide a minimum set of test structures
used to characterize a MOS technology. The test structures of the ETC are generated automatically
by a computer program for a given MOS technology. The program also generates test structures which
are designed to characterize reliability aspects of a MOS technology (Reliability Test Chip. RTC)
[6, 7, 8].